In integrated circuit design, a critical area is a section of a circuit design wherein a particle of a particular size can cause a failure.^[1] It measures the sensitivity of the circuit to a reduction in yield.^[2]

The critical area ${\textstyle (A_{c})}$ on a single layer integrated circuit design is given by:

$${\displaystyle A_{c}=\int _{0}^{\infty }A(r)D(r)dr}$$

where ${\displaystyle A(r)}$ is the area in which a defect of radius ${\displaystyle r}$ will cause a failure, and ${\displaystyle D(r)}$ is the density function of said defect.^[3]

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